0.5um 40v/40v hcmos technology is a general non-epi hvcmos platform which was developed by fmic. compare with 1.0um 40v hvcmos which belongs to same application field, it has similar production cycle and cost but much higher integration density. compare with other 0.5um hvcmos platform in this industry, it has much shorter production cycle and lower production cost. this platform is applicable to power management, led driver and other consumer electronic field.
1) process features
ø normal 5v cmos compatible with the industry standard
ø 19 masks and 19 photo layers (3 option layers included), non epi process.
ø quad well: deep nw, hvnw, nwell, pwell
ø locos and pn junction isolation
ø dual gox,125a&1000a
ø sog planarization, w plug process
ø vds 5~40v, vgs 5~40v
ø ac/dc converter
ø dc/dc converter
ø driver ic
ø hv mixed-signal